Processes of cluster growth in the magnetron DC plasma
The analysis of the processes occurs in magnetron discharge volume involving metal atoms is presented. The model for cluster generation and growth during condensation of metal vapor, which forming as a result of cathode erosion, is developed. In the frame of the originating model we calculate the efficiency of the cluster generation.
В данной работе производится анализ процессов, происходящих в области магнетронного разряда с участием атомов металла. Строится модель для описания процессов рождения и роста кластеров при конденсации паров металла, полученных вследствие эрозии катода. На основании построенной модели производится расчет эффективности работы такой установки.
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