Physical-Chemical
Kinetics

in Gas
Dynamics

Physical-Chemical
Kinetics

in Gas
Dynamics

Contents
About
For authors
Editorial Board
Contacts

I. Iskandarova

Organizations
Articles

Modelling growth of the film during the atomic layer deposition
Volume 4, 2006 year

Russian

View article
PDF, 667.3 KB

Electronic, peer-reviewed journal, full-text articles are available at http://chemphys.edu.ru/
Copyright © 2003—2025 Institute of Mechanics Lomonosov Moscow State University

ISSN 1991-6396
Certificate of Mass Media Registration: digital № 77-6360, Jun. 10, 2002.
Published since 2003